Handbook of Plasma Immersion Ion Implantation and Deposition
André Anders
This is the first book to describe a family of plasma techniques used to modify the surface and near-surface layer of solid materials.
种类:
年:
2000
出版:
1
出版社:
Wiley-Interscience
语言:
english
页:
736
ISBN 10:
0471246980
文件:
PDF, 51.52 MB
IPFS:
,
english, 2000
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